Working gas effect on properties of Al 2 O 3 film in plasma-enhanced atomic layer deposition

Published 2016 View Full Article

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Title
Working gas effect on properties of Al 2 O 3 film in plasma-enhanced atomic layer deposition
Authors
Keywords
Al, 2, O, 3, film, Working gas effect, Optical emission spectroscopy, Plasma-enhanced atomic layer deposition, SiO, x, interlayer
Journal
THIN SOLID FILMS
Volume 619, Issue -, Pages 342-346
Publisher
Elsevier BV
Online
2016-10-22
DOI
10.1016/j.tsf.2016.10.036

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