Influence of power and temperature on properties of sputtered AZO films

Published 2016 View Full Article

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Title
Influence of power and temperature on properties of sputtered AZO films
Authors
Keywords
AZO, Sputtering, Contact Angle Hysteresis, Wettability, Ethylene glycol, Optical properties
Journal
THIN SOLID FILMS
Volume 620, Issue -, Pages 182-187
Publisher
Elsevier BV
Online
2016-09-20
DOI
10.1016/j.tsf.2016.08.073

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