Structural and morphological characterization of Al 2 O 3 coated macro-porous silicon by atomic layer deposition

Published 2016 View Full Article

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Title
Structural and morphological characterization of Al 2 O 3 coated macro-porous silicon by atomic layer deposition
Authors
Keywords
Electrochemical anodization, Atomic layer deposition, Porous silicon, Conformal coating, Band gap energy
Journal
THIN SOLID FILMS
Volume 616, Issue -, Pages 628-634
Publisher
Elsevier BV
Online
2016-09-17
DOI
10.1016/j.tsf.2016.09.026

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