Optical and structural properties of sputter deposited ZnO thin films in relevance to post-annealing and substrate temperatures

Published 2016 View Full Article

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Title
Optical and structural properties of sputter deposited ZnO thin films in relevance to post-annealing and substrate temperatures
Authors
Keywords
Sputter deposition, Ellipsometry, Zinc oxide, Optical properties, Band gap, Post-annealing
Journal
THIN SOLID FILMS
Volume 606, Issue -, Pages 133-142
Publisher
Elsevier BV
Online
2016-03-23
DOI
10.1016/j.tsf.2016.03.041

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