Advanced analysis tool for X-ray photoelectron spectroscopy profiling: Cleaning of perovskite SrTiO3 oxide surface using argon cluster ion source

Published 2016 View Full Article

Authors

Keywords

Oxide surface, Surface cleaning, chemical analysis, Argon etching, Cluster ions bombardment, X-ray photoelectron spectroscopy profiling

Journal

THIN SOLID FILMS

Volume 601, Issue -, Pages 89-92

Publisher

Elsevier BV

Online

2015-11-12

DOI

10.1016/j.tsf.2015.11.017

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