Electronic properties of negatively charged SiO x films deposited by Atmospheric Pressure Plasma Liquid Deposition for surface passivation of p-type c-Si solar cells

Title
Electronic properties of negatively charged SiO x films deposited by Atmospheric Pressure Plasma Liquid Deposition for surface passivation of p-type c-Si solar cells
Authors
Keywords
Surface passivation, Negative fixed charges, Interface trap charges, Silicon dioxide films, C-V characterization, Solar cells
Journal
THIN SOLID FILMS
Volume 611, Issue -, Pages 74-77
Publisher
Elsevier BV
Online
2016-05-13
DOI
10.1016/j.tsf.2016.05.016

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