Performance analysis of RF-sputtered ZnO/Si heterojunction UV photodetectors with high photo-responsivity

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Title
Performance analysis of RF-sputtered ZnO/Si heterojunction UV photodetectors with high photo-responsivity
Authors
Keywords
Zinc oxide, Silicon, RF sputtering, Heterojunction diode, Structural characterization, Device responsivity
Journal
SUPERLATTICES AND MICROSTRUCTURES
Volume 91, Issue -, Pages 62-69
Publisher
Elsevier BV
Online
2015-12-29
DOI
10.1016/j.spmi.2015.12.036

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