P-type single-crystalline ZnO films obtained by (N,O) dual implantation through dynamic annealing process

Published 2016 View Full Article

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Title
P-type single-crystalline ZnO films obtained by (N,O) dual implantation through dynamic annealing process
Authors
Keywords
p-type single-crystalline ZnO films, Oxygen vacancy, Molecular beam epitaxy, Ion implantation, Dynamic annealing
Journal
SUPERLATTICES AND MICROSTRUCTURES
Volume 100, Issue -, Pages 468-473
Publisher
Elsevier BV
Online
2016-10-07
DOI
10.1016/j.spmi.2016.10.006

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