Thickness effect on the optical and morphological properties in Al 2 O 3 /ZnO nanolaminate thin films prepared by atomic layer deposition

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Title
Thickness effect on the optical and morphological properties in Al 2 O 3 /ZnO nanolaminate thin films prepared by atomic layer deposition
Authors
Keywords
Nanolaminates films, Atomic layer deposition, Optical properties, Band gap modulation
Journal
SUPERLATTICES AND MICROSTRUCTURES
Volume 90, Issue -, Pages 265-273
Publisher
Elsevier BV
Online
2015-12-29
DOI
10.1016/j.spmi.2015.12.022

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