Role of metal nanoparticles on porosification of silicon by metal induced etching (MIE)

Published 2016 View Full Article

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Title
Role of metal nanoparticles on porosification of silicon by metal induced etching (MIE)
Authors
Keywords
Porous silicon, Silicon nanostructures, Metal induced etching, Metal assisted chemical etching
Journal
SUPERLATTICES AND MICROSTRUCTURES
Volume 94, Issue -, Pages 101-107
Publisher
Elsevier BV
Online
2016-04-06
DOI
10.1016/j.spmi.2016.04.004

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