Planar Fully-Depleted-Silicon-On-Insulator technologies: Toward the 28nm node and beyond

Title
Planar Fully-Depleted-Silicon-On-Insulator technologies: Toward the 28nm node and beyond
Authors
Keywords
FDSOI, Ultra-thin BOX and body FDSOI, Multi-Vt, Back-biasing, Strain enhancement
Journal
SOLID-STATE ELECTRONICS
Volume 117, Issue -, Pages 37-59
Publisher
Elsevier BV
Online
2015-12-12
DOI
10.1016/j.sse.2015.11.006

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