Fabrication and performance evaluation of a metal-based bimorph piezoelectric MEMS generator for vibration energy harvesting

Title
Fabrication and performance evaluation of a metal-based bimorph piezoelectric MEMS generator for vibration energy harvesting
Authors
Keywords
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Journal
Smart Materials and Structures
Volume 25, Issue 10, Pages 105016
Publisher
IOP Publishing
Online
2016-09-16
DOI
10.1088/0964-1726/25/10/105016

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