Evaluation of subsurface damage caused by ultra-precision turning in fabrication of CaF 2 optical micro resonator

Title
Evaluation of subsurface damage caused by ultra-precision turning in fabrication of CaF 2 optical micro resonator
Authors
Keywords
Ultra-precision, Surface integrity, Optical micro-resonator
Journal
CIRP ANNALS-MANUFACTURING TECHNOLOGY
Volume 64, Issue 1, Pages 117-120
Publisher
Elsevier BV
Online
2015-05-02
DOI
10.1016/j.cirp.2015.04.076

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