4.7 Article

Active surface geometrical control of noise in nanowire-SAW sensors

Journal

SENSORS AND ACTUATORS B-CHEMICAL
Volume 231, Issue -, Pages 469-473

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2016.03.015

Keywords

Hydrogen; ZnO; Nanowire; Surface acoustic wave; PLD-VLS; SAW sensors

Funding

  1. Romanian National Authority for Scientific Research, CNCS-UEFISCDI [LAPLAS 4 PN 09 39 01 05, PN-II-PT-PCCA-2011-3.2-0762, PN-II-RU-TE-2014-4-0342]

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ZnO nanowires were grown on equal areas of the active surface of a surface acoustic wave (SAW) sensor, using a range of patterns: parallel lines, perpendicular lines, curved stripes and a fully covered square zone. The sensor's frequency shift proved to be a geometry-independent parameter while noise depended significantly on geometry. A 2.5-fold variation in noise was obtained between the best (parallel stripes) and worst (compact area) patterns. A film deposited over such structures led to a further increase in noise, up to a comparable and pattern-independent value. Correlating the frequency shift increase with the sensor's covered active area, our results suggest that patterns with a filling factor above 40% could enhance SAW sensor performance via efficient noise reduction. (C) 2016 Elsevier B.V. All rights reserved.

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