Fabrication, modeling and simulation of high sensitivity capacitive humidity sensors based on ZnO nanorods

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Title
Fabrication, modeling and simulation of high sensitivity capacitive humidity sensors based on ZnO nanorods
Authors
Keywords
Humidity sensor, Capacitive, ZnO nanorod, Comsol simulation
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 224, Issue -, Pages 338-343
Publisher
Elsevier BV
Online
2015-10-26
DOI
10.1016/j.snb.2015.10.012

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