Shape memory alloy thin films and heterostructures for MEMS applications: A review

Published 2016 View Full Article

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Title
Shape memory alloy thin films and heterostructures for MEMS applications: A review
Authors
Keywords
Shape memory alloys, Thin films, Heterostructures, MEMS
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 242, Issue -, Pages 162-181
Publisher
Elsevier BV
Online
2016-03-06
DOI
10.1016/j.sna.2016.02.026

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