A feasibility study of piezoelectric micromachined ultrasonic transducers fabrication using a multi-user MEMS process

Published 2016 View Full Article

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Title
A feasibility study of piezoelectric micromachined ultrasonic transducers fabrication using a multi-user MEMS process
Authors
Keywords
Piezoelectric micromachined ultrasonic transducers, Multi-user MEMS processes (MUMPs)
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 247, Issue -, Pages 430-439
Publisher
Elsevier BV
Online
2016-07-03
DOI
10.1016/j.sna.2016.06.029

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