Design and fabrication of an innovative three-axis Hall sensor

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Title
Design and fabrication of an innovative three-axis Hall sensor
Authors
Keywords
3D Hall sensor, High-accuracy Hall sensor, Planar Hall effect, Three-axis magnetic field measurement, Small active volume
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 237, Issue -, Pages 62-71
Publisher
Elsevier BV
Online
2015-12-02
DOI
10.1016/j.sna.2015.11.022

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