Experimental Analysis of Bisbenzocyclobutene Bonded Capacitive Micromachined Ultrasonic Transducers

Published 2016 View Full Article

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Title
Experimental Analysis of Bisbenzocyclobutene Bonded Capacitive Micromachined Ultrasonic Transducers
Authors
Keywords
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Journal
SENSORS
Volume 16, Issue 7, Pages 959
Publisher
MDPI AG
Online
2016-06-26
DOI
10.3390/s16070959
References
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