On a silicon-based photonic-crystal cavity for the near-IR region: Numerical simulation and formation technology

Title
On a silicon-based photonic-crystal cavity for the near-IR region: Numerical simulation and formation technology
Authors
Keywords
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Journal
SEMICONDUCTORS
Volume 50, Issue 8, Pages 1112-1116
Publisher
Pleiades Publishing Ltd
Online
2016-08-01
DOI
10.1134/s1063782616080212

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