Chlorine-based dry etching ofβ-Ga2O3

Title
Chlorine-based dry etching ofβ-Ga2O3
Authors
Keywords
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Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 31, Issue 6, Pages 065006
Publisher
IOP Publishing
Online
2016-04-15
DOI
10.1088/0268-1242/31/6/065006

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