Atomic layer deposition of high-k dielectrics on III–V semiconductor surfaces

Published 2016 View Full Article

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Title
Atomic layer deposition of high-k dielectrics on III–V semiconductor surfaces
Authors
Keywords
Atomic Layer Deposition, Dielectrics, III-V semiconductors, Interface clean-up, Fermi level pinning
Journal
PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS
Volume 62, Issue 4, Pages 1-21
Publisher
Elsevier BV
Online
2016-12-02
DOI
10.1016/j.pcrysgrow.2016.11.001

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