Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system

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Title
Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system
Authors
Keywords
Metrology, Probe, Force
Journal
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume 43, Issue -, Pages 525-529
Publisher
Elsevier BV
Online
2015-10-25
DOI
10.1016/j.precisioneng.2015.09.016

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