RF power absorption by plasma of a low-pressure inductive discharge

Published 2016 View Full Article

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Title
RF power absorption by plasma of a low-pressure inductive discharge
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 25, Issue 1, Pages 015016
Publisher
IOP Publishing
Online
2016-01-05
DOI
10.1088/0963-0252/25/1/015016

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