Journal
PHYSICS OF PLASMAS
Volume 23, Issue 3, Pages -Publisher
AIP Publishing
DOI: 10.1063/1.4943876
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Funding
- Korea Research Institute of Standards and Science (KRISS)
- Converging Research Center Program through the Ministry of Science, ICT and Future Planning, Korea [NRF-2014M3C1A8048786, NRF-2014M3C1A8053712]
- R&D Convergence Program - Korea Research Council of Fundamental Science Technology [R&D Convergence-14-6-NFRI]
- Electronic Intelligence device industrial Strategic Technology Development Program [10052890, 10053098]
- advanced technology center Technology Innovation Program - Ministry of Trade, industry & energy (MI, Korea) [10052307]
- R&D Program of Plasma BigData ICT Convergence Technology Research Project through the National Fusion Research Institute of Korea (NFRI) - Government funds
- Chungnam National University
- Korea Evaluation Institute of Industrial Technology (KEIT) [10052307] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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As collisions between electrons and neutral particles constitute one of the most representative physical phenomena in weakly ionized plasma, the electron-neutral (e-n) collision frequency is a very important plasma parameter as regards understanding the physics of this material. In this paper, we measured the e-n collision frequency in the plasma using a calibrated cutoff-probe. A highly accurate reactance spectrum of the plasma/cutoff-probe system, which is expected based on previous cutoff-probe circuit simulations [Kim et al., Appl. Phys. Lett. 99, 131502 (2011)], is obtained using the calibrated cutoff-probe method, and the e-n collision frequency is calculated based on the cutoff-probe circuit model together with the high-frequency conductance model. The measured e-n collision frequency (by the calibrated cutoff-probe method) is compared and analyzed with that obtained using a Langmuir probe, with the latter being calculated from the measured electron-energy distribution functions, in wide range of gas pressure. (C) 2016 AIP Publishing LLC.
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