Gradient nanostructured coatings obtained by magnetron sputtering of a multiphase AlN–TiB2–TiSi2 target
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Title
Gradient nanostructured coatings obtained by magnetron sputtering of a multiphase AlN–TiB2–TiSi2 target
Authors
Keywords
magnetron sputtering, structural and phase composition, nanostructures, annealing
Journal
PHYSICS OF METALS AND METALLOGRAPHY
Volume 117, Issue 10, Pages 990-1002
Publisher
Pleiades Publishing Ltd
Online
2016-10-19
DOI
10.1134/s0031918x16020071
References
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