Journal
PHYSICAL CHEMISTRY CHEMICAL PHYSICS
Volume 18, Issue 5, Pages 3402-3408Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/c5cp07863f
Keywords
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Funding
- Korea CCS R&D Center (KCRC) grant - Korean government (Ministry of Education, Science and Technology) [NRF-2014M1A8A1049303]
- National Research Foundation of Korea [2014M1A8A1049303, 10Z20130011056] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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Metal-assisted chemical etching (MaCE) of a (100) n-type GaP using patterned Pd catalysts in a mixed solution of HF and H2O2 at room temperature is reported for the first time. Various patterns of Pd catalysts, i.e., meshes and patches, with length scales ranging from 200 nm to several mu m were used. Depending on the sizes of the Pd catalysts, GaP exhibits two distinctively different MaCE mechanisms: the conventional and inverse MaCE. With Pd nanomeshes, the ordered arrays of GaP nanocones were formed by the preferential removal of GaP directly under the Pd catalysts by the MaCE mechanism. When Pd micro-patches with several mu m in length were used, bare GaP uncovered with the Pd patches was selectively dissolved to form GaP micro-mesa structures, following an inverse MaCE mechanism. We attribute these size-dependent etching behaviors to the dissolution limited etching characteristics of GaP during MaCE. Furthermore, we show that etched GaP structures can exhibit both mechanisms when a micro-patterned Pd nanomesh is used. The morphological evolution of etched GaP structures produced by MaCE is also presented.
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