Wafer scale fabrication of highly dense and uniform array of sub-5 nm nanogaps for surface enhanced Raman scatting substrates

Published 2016 View Full Article

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Title
Wafer scale fabrication of highly dense and uniform array of sub-5 nm nanogaps for surface enhanced Raman scatting substrates
Authors
Keywords
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Journal
OPTICS EXPRESS
Volume 24, Issue 18, Pages 20808
Publisher
The Optical Society
Online
2016-09-01
DOI
10.1364/oe.24.020808

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