4.6 Article

Precise measurement of micro bubble resonator thickness by internal aerostatic pressure sensing

Journal

OPTICS EXPRESS
Volume 24, Issue 18, Pages 20855-20861

Publisher

OPTICAL SOC AMER
DOI: 10.1364/OE.24.020855

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Funding

  1. National Natural Science Foundation of China (NSFC) [11474070, 61327008, 11074051]
  2. Specialized Research Fund for the Doctoral Program of Higher Education [20130071130004]

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We develop a new, simple and non-destructive method to precisely measure the thickness of thin wall micro bubble resonators (MBRs) by using internal aerostatic pressure sensing. Measurement error of 1% at a bubble wall thickness of 2 mu m is achieved. This method is applicable to both thin wall and thick wall MBR with high measurement accuracy. (C) 2016 Optical Society of America

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