Measurement of four-degree-of-freedom error motions based on non-diffracting beam

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Title
Measurement of four-degree-of-freedom error motions based on non-diffracting beam
Authors
Keywords
Linear stage, Motions Error, Multi-degree-of-freedom, Non-diffracting beam
Journal
OPTICS COMMUNICATIONS
Volume 366, Issue -, Pages 168-173
Publisher
Elsevier BV
Online
2015-12-29
DOI
10.1016/j.optcom.2015.12.051

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