A simple method for well-defined and clean all-SiC nano-ripples in ambient air

Published 2016 View Full Article

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Title
A simple method for well-defined and clean all-SiC nano-ripples in ambient air
Authors
Keywords
Nano-ripples, Femtosecond laser, Chemical selective etching, Silicon carbide
Journal
OPTICS AND LASERS IN ENGINEERING
Volume 82, Issue -, Pages 141-147
Publisher
Elsevier BV
Online
2016-03-22
DOI
10.1016/j.optlaseng.2016.02.026

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