A Quantum Chemical Descriptor for CVD Precursor Design: Predicting Decomposition Rates of TBP and TBAs Isomers and Derivatives

CHEMICAL VAPOR DEPOSITION

Volume 21, Issue 7-9, Pages 161-165

WILEY-V C H VERLAG GMBH

Precursor design; density functional theory; Gas-phase reactions; beta-hydrogen elimination; partial charges

Electrochemistry Materials Science, Coatings & Films Physics, Condensed Matter

1. DFG [RTG 1782]
2. Beilstein Institut, Frankfurt/Main