Growth Features of 3C-SiC/Si Films Fabricated by HTCVD

Published 2023 View Full Article

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Title
Growth Features of 3C-SiC/Si Films Fabricated by HTCVD
Authors
Keywords
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Journal
Optical Memory and Neural Networks (Information Optics)
Volume 32, Issue S1, Pages S102-S108
Publisher
Allerton Press
Online
2023-11-03
DOI
10.3103/s1060992x23050132
References
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