Deposition of diamond films by microwave plasma CVD on 4H-SiC substrates

Title
Deposition of diamond films by microwave plasma CVD on 4H-SiC substrates
Authors
Keywords
-
Journal
Materials Research Express
Volume -, Issue -, Pages -
Publisher
IOP Publishing
Online
2023-11-03
DOI
10.1088/2053-1591/ad094f

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