High-purity 3D nano-objects grown by focused-electron-beam induced deposition

Published 2016 View Full Article

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Title
High-purity 3D nano-objects grown by focused-electron-beam induced deposition
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 27, Issue 35, Pages 355301
Publisher
IOP Publishing
Online
2016-07-25
DOI
10.1088/0957-4484/27/35/355301

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