Encapsulation layer design and scalability in encapsulated vertical 3D RRAM

Published 2016 View Full Article

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Title
Encapsulation layer design and scalability in encapsulated vertical 3D RRAM
Authors
Keywords
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Journal
NANOTECHNOLOGY
Volume 27, Issue 20, Pages 205202
Publisher
IOP Publishing
Online
2016-04-05
DOI
10.1088/0957-4484/27/20/205202

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