Gas-assisted electron-beam-induced nanopatterning of high-quality titanium oxide

Published 2016 View Full Article

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Title
Gas-assisted electron-beam-induced nanopatterning of high-quality titanium oxide
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 27, Issue 11, Pages 115304
Publisher
IOP Publishing
Online
2016-02-16
DOI
10.1088/0957-4484/27/11/115304

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