Self limiting atomic layer deposition of Al2O3 on perovskite surfaces: a reality?

Title
Self limiting atomic layer deposition of Al2O3 on perovskite surfaces: a reality?
Authors
Keywords
-
Journal
Nanoscale
Volume 8, Issue 14, Pages 7459-7465
Publisher
Royal Society of Chemistry (RSC)
Online
2016-03-08
DOI
10.1039/c5nr06974b

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