SANTA: Self-aligned nanotrench ablation via Joule heating for probing sub-20 nm devices
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Title
SANTA: Self-aligned nanotrench ablation via Joule heating for probing sub-20 nm devices
Authors
Keywords
nanolithography, carbon nanotubes, graphene, finite element, self-aligned fabrication, nanoscale thermal transport
Journal
Nano Research
Volume 9, Issue 10, Pages 2950-2959
Publisher
Springer Nature
Online
2016-07-13
DOI
10.1007/s12274-016-1180-0
References
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