High performance SAW resonator with spurious mode suppression using double-layer electrode transverse modulation

Published 2023 View Full Article

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Title
High performance SAW resonator with spurious mode suppression using double-layer electrode transverse modulation
Authors
Keywords
-
Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume -, Issue -, Pages -
Publisher
IOP Publishing
Online
2023-10-26
DOI
10.1088/1361-6641/ad06c0

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