4.4 Article

Amorphization of gold film on silicon single crystal by hardness indentation at room temperature

Journal

PHILOSOPHICAL MAGAZINE
Volume -, Issue -, Pages -

Publisher

TAYLOR & FRANCIS LTD
DOI: 10.1080/14786435.2023.2255973

Keywords

Indentation; amorphous silicon; transmission electron microscopy

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The formation of an amorphous gold-silicon alloy by indentation is reported. A polycrystalline gold film on a silicon substrate was indented and resulted in the formation of an amorphous alloy. The effect of the substrate was also investigated using a gold film on a SiO2 substrate, where no amorphization was observed. The amorphization mechanism is discussed based on thermodynamics.
The formation of an amorphous gold-silicon alloy by indentation is reported. A polycrystalline gold film formed via vapour deposition on a silicon (111) substrate was indented using a Berkovich indenter with a load of 0.05 N. The indentation area was observed by transmission electron microscopy after thinning the silicon substrate from the back side (unindented surface). A set of halo rings, identified as an amorphous gold-silicon alloy was observed. A gold film on a SiO2 substrate was also used to investigate the effect of the substrate, and no amorphization was observed. The amorphization mechanism is discussed based on thermodynamics.

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