Experimental Study of Electrical Breakdown in MEMS/NEMS Devices With Deep Submicron Gaps

Experimental study of gas breakdown and electron emission in nanoscale gaps at atmospheric pressure

(2022) Haoxuan Wang et al.   APPLIED PHYSICS LETTERS

Low motional impedance distributed Lamé mode resonators for high frequency timing applications

(2020) Anosh Daruwalla et al.   Microsystems & Nanoengineering

Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes: Breaking the barrier toward high-performance monolithic inertial measurement units

(2017) Haoran Wen et al.   Microsystems & Nanoengineering

Electrical characteristics of nanometer gaps in vacuum under direct voltage

(2014) Guodong Meng et al.   IEEE TRANSACTIONS ON DIELECTRICS AND ELECTRICAL INSULATION

Microscale gas breakdown: ion-enhanced field emission and the modified Paschen’s curve

(2014) D B Go et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Scaling law for direct current field emission-driven microscale gas breakdown

(2013) A. Venkattraman et al.   PHYSICS OF PLASMAS