A Silicon MEMS Quatrefoil Suspension Gyroscope

Sub-Deg-per-Hour Edge-Anchored Bulk Acoustic Wave Micromachined Disk Gyroscope

(2021) Madan Parajuli et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A vibrating beam MEMS accelerometer for gravity and seismic measurements

(2020) Arif Mustafazade et al.   Scientific Reports

0.04 degree-per-hour MEMS disk resonator gyroscope with high-quality factor (510 k) and long decaying time constant (74.9 s)

(2018) Qingsong Li et al.   Microsystems & Nanoengineering

Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices

(2016) Diego E. Serrano et al.   Microsystems & Nanoengineering

Analytical formulation of modal frequency split in the elliptical mode of SCS micromechanical disk resonators

(2014) Xueyong Wei et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Thermoelastic damping in micro-scale circular plate resonators

(2009) Yuxin Sun et al.   JOURNAL OF SOUND AND VIBRATION