TEM characterization of defects in κ-(InxGa1-x)2O3 thin film grown on (001) FZ-grown ε-GaFeO3 substrate by mist CVD

Title
TEM characterization of defects in κ-(InxGa1-x)2O3 thin film grown on (001) FZ-grown ε-GaFeO3 substrate by mist CVD
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume -, Issue -, Pages -
Publisher
IOP Publishing
Online
2023-10-31
DOI
10.35848/1347-4065/ad07fb

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