Graphene transfer methods for the fabrication of membrane-based NEMS devices

Published 2016 View Full Article

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Title
Graphene transfer methods for the fabrication of membrane-based NEMS devices
Authors
Keywords
Nanoelectromechanical systems (NEMS), Graphene transfer, Suspended graphene, Pressure sensor
Journal
MICROELECTRONIC ENGINEERING
Volume 159, Issue -, Pages 108-113
Publisher
Elsevier BV
Online
2016-03-02
DOI
10.1016/j.mee.2016.02.065

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