Fabrication of phononic crystals on free-standing silicon membranes

Published 2016 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
Fabrication of phononic crystals on free-standing silicon membranes
Authors
Keywords
E-beam lithography, Plasma etching, Nanomembrane, Phononics
Journal
MICROELECTRONIC ENGINEERING
Volume 149, Issue -, Pages 41-45
Publisher
Elsevier BV
Online
2015-09-13
DOI
10.1016/j.mee.2015.09.004

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.