Controlled fabrication of periodically high-aspect ratio CVD-diamond nanopillar arrays by pure oxygen etching process

Published 2016 View Full Article

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Title
Controlled fabrication of periodically high-aspect ratio CVD-diamond nanopillar arrays by pure oxygen etching process
Authors
Keywords
Diamond nanopillar, E-beam lithography, Inductively coupled plasma etching
Journal
MICROELECTRONIC ENGINEERING
Volume 155, Issue -, Pages 61-66
Publisher
Elsevier BV
Online
2016-02-21
DOI
10.1016/j.mee.2016.02.031

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