Ultrafast laser ablation of soda-lime glass for fabricating microfluidic pillar array channels

Published 2016 View Full Article

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Title
Ultrafast laser ablation of soda-lime glass for fabricating microfluidic pillar array channels
Authors
Keywords
Ultrafast laser, Picosecond laser, Ablation, Pillar structure, Microfluidic
Journal
MICROELECTRONIC ENGINEERING
Volume 158, Issue -, Pages 95-101
Publisher
Elsevier BV
Online
2016-03-20
DOI
10.1016/j.mee.2016.03.034

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