Development of a Probe System for Measuring Plasma Parameters under Conditions of Plasma Polymerization and Synthesis of Nanostructures

Title
Development of a Probe System for Measuring Plasma Parameters under Conditions of Plasma Polymerization and Synthesis of Nanostructures
Authors
Keywords
-
Journal
HIGH ENERGY CHEMISTRY
Volume 57, Issue S1, Pages S172-S177
Publisher
Pleiades Publishing Ltd
Online
2023-09-09
DOI
10.1134/s0018143923070378

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