Plasma-Chemical Method for Synthesis of Nanosized Silicon Carbide Powder Using Microwave Surface Discharge

Published 2023 View Full Article

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Title
Plasma-Chemical Method for Synthesis of Nanosized Silicon Carbide Powder Using Microwave Surface Discharge
Authors
Keywords
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Journal
Bulletin of the Lebedev Physics Institute
Volume 50, Issue 9, Pages 391-395
Publisher
Allerton Press
Online
2023-10-26
DOI
10.3103/s1068335623090026
References
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